Polysilazane SOD Ceramable^TM is perhydropolysilazane based inorganic SOD materials to be used as a STI/PMD application with highly reliable silica based material by steam curing ambient.

The biggest advantage of Ceramable^TM compared to other SOG is that an excellent film property can be obtained even in deep trench with width of less than 50nm.

We believe Ceramable^TM is one of the most promising solutions for STI/PMD application in advanced devices standing viewpoint from gap-filling and planarizing capabilities.

Typical properties