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We keep developing our machanical technology to across new century and help more customers, not only in semiconductor fields.
As Fala technology has been developed over ten years, many semiconductor industries are familiar with Fala.
We objectives are to find tool solutions & offer customer-oriented products for resolving customer’s requirements & needs. Fala keeps continuing to develop new products to support customers in semiconductor industries as possible as we can.
Every Fala product is warranted for 2 years against manufacturing defects. Under some applications, customers have been able to get 900,000 wafer-processed per bearing kit while others could not get passed 200,000 as that represents 5 years+ of continuous production.
Ulvac 300 mm – Our supplier Fala recently released a complete bearing solution for the 300 mm Ulvac Keytran robot used in ENTRON deposition system. Using ceramic hybrid shielded bearings and PFPE-PTFE lubrification, we offer loose bearing kits or fully preassembled robots. Spare wrist assemblies are available upon request.
提供項目
Configuration - The Fala bearing kit for the Ulvac 300 mm PVD KEYTRAN dual blade robot contains all the wrist bearings and elbow bearings necessary for normal maintenance. The bearings can be replaced by the end-user or pre-installed at our factory. Unlike the OEM parts, the Fala bearings use ceramic hybrid shielded technology with PTFE-PFPE lubricant for long trouble-free life. These bearings are used in the dual independent blade robot shown in composite form above.
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Name |
PN |
Description |
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Ulvac™ Standard |
H10177 |
8 elbow bearings, ceramic hybrid shielded and 8 wrist bearings, ceramic hybrid shielded, lubricated, hardware kit included |
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Removal tool |
ULV_UE |
Specialty wrench for Ulvac maintenance |
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Replacement blade housings available separately. OEM Ref. 1039371A |
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Akrion Goldfinger spin motor bearings
Fala has developed a replacement bearing for the Akrion Goldfinger spin assembly. The high-precision ceramic hybrid bearings can be installed by the customer or us.
Novellus Gamma rotation kit bearings
As OEM bearings within the Gamma wafer handler last less than 6 months. Fala has designed shielded high-temperature angular bearings that are a direct retrofit and can be installed by the end-user.
PN: E1002 OEM # 15-2774
Varian/TEL MB2 robots contain bearings that need to be periodically replaced. We provide a set of high precision / special radial ceramic hybrid bearings that fit directly into the M2i/MB2 Varian/TEL robot arms, and sell individual replacement bearings and mechanical repair services. When it is necessary, we can repair and replace broken robot components. Each robot is taken apart, old bearings are moved, components are cleaned, repaired or replaced as needed and the robot ships back fully assembled.
提供項目
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Name |
PN |
Description |
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MB2™ Repair |
R70000 |
Mechanical overhaul of MB2 robot. Includes replacement bearings and component repair. Broken or missing components are remanufactured or replaced. |
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MB2 elbow |
E2600 |
Bearing, ceramic hybrid, shielded |
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MB2 elbow |
E2200 |
Bearing, ceramic hybrid, shielded |
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Product Item |
Description |
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Product 1: |
Throttle Valve Bearing, Small, PN: E2500, OD 0.62”, ID 0.24”, Ceramic hybrid construction, shielded, angular, PFPE-PTFE lubrication. |
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Product 2: |
Throttle Valve Bearing, Large, PN:E3750 OD 0.87”, ID 0.37”, Ceramic hybrid construction, shielded, angular, PFPE-PTFE lubrication. |
新竹縣竹北市高鐵二路32號11樓之3
TEL：+886-3-6682287 FAX：+886-3-6682267
www.gpic.com.tw
